Sputtering materials for VLSI and thin film devices /
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: hist...
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| Online Access: |
Full text (MCPHS users only) |
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| Main Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Norwich, N.Y. :
William Andrew,
2011
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| Subjects: | |
| Local Note: | ProQuest Ebook Central |
