Handbook of silicon based MEMS materials and technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical method...
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| Online Access: |
Full text (MCPHS users only) |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam ; Boston :
William Andrew/Elsevier,
2010
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| Edition: | 1st ed. |
| Series: | Micro & nano technologies.
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| Subjects: | |
| Local Note: | ProQuest Ebook Central |
