Handbook of silicon based MEMS : materials & technologies /

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Bibliographic Details
Online Access:	Full text (MCPHS users only)
Other Authors:	Lindroos, Veikko (Editor)
Format:	Electronic eBook
Language:	English
Published:	Norwich : William Andrew, 2015
Edition:	Second edition.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Micro-Electrical-Mechanical Systems
Local Note:	ProQuest Ebook Central

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Full text (MCPHS users only)