Analysis and design principles of MEMS devices /
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...
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Full text (MCPHS users only) |
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| Main Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam ; Boston ; London :
Elsevier,
2005
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| Subjects: | |
| Local Note: | ProQuest Ebook Central |
