Adhesion aspects in MEMS-NEMS

Adhesion aspects in MEMS-NEMS /

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS d...

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Bibliographic Details
Online Access: Full text (MCPHS users only)
Other Authors: Kim, Seong H., Dugger, M. T. (Michael T.), Mittal, K. L., 1945-
Format: Electronic eBook
Language:English
Published: Leiden ; Boston : Vsp, 2010
Subjects:
Microelectromechanical systems.
Nanoelectromechanical systems.
Adhesion.
Surfaces (Technology)
Micro-Electrical-Mechanical Systems
Adhesiveness
adhesion.
Local Note:ProQuest Ebook Central

Internet

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